{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11948819","patent":{"patent_number":"US-11948819","title":"Method of evaluating silicon wafer, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, and silicon wafer","assignee":null,"inventors":[],"filing_date":"2017-06-14T00:00:00.000Z","publication_date":"2024-04-02T00:00:00.000Z","cpc_codes":["H01L","G01N","G01N","G01N","H01L","H01L"],"num_claims":6,"abstract":"Provided is a method of evaluating a silicon wafer, the method including a first determination that determines the presence or absence of an abnormality by inspecting a surface of an evaluation-target silicon wafer with a light scattering type surface inspection device; and a second determination that determines the presence or absence of an abnormality through observing, with an atomic force microscope, a region of the surface of the evaluation-target silicon wafer, where the presence of an abnormality has not been confirmed in the first determination."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of evaluating silicon wafer, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, and silicon wafer","description":"Provided is a method of evaluating a silicon wafer, the method including a first determination that determines the presence or absence of an abnormality by inspecting a surface of an evaluation-target","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11948819","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11948819","citation_suggestion":"Patentable. \"Method of evaluating silicon wafer, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, and silicon wafer\" (US-11948819). https://patentable.app/patents/US-11948819","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11948819","json":"https://patentable.app/api/llm-context/US-11948819","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T11:40:55.578Z"}