{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11951583","patent":{"patent_number":"US-11951583","title":"Electrostatic chuck with high insulation performance and electrostatic attraction force","assignee":null,"inventors":[],"filing_date":"2021-08-31T00:00:00.000Z","publication_date":"2024-04-09T00:00:00.000Z","cpc_codes":["B23Q","H01L","H01L","H01L"],"num_claims":4,"abstract":"An electrostatic chuck includes a ceramic base, a ceramic dielectric layer, an electrostatic electrode, and a ceramic insulating layer. The ceramic dielectric layer is positioned on the ceramic base and is thinner than the ceramic base. The electrostatic electrode is embedded between the ceramic dielectric layer and the ceramic base. The ceramic insulating layer is positioned on the ceramic dielectric layer and is thinner than the ceramic dielectric layer. The ceramic insulating layer has a higher volume resistivity and withstand voltage than the ceramic dielectric layer, and the ceramic dielectric layer has a higher dielectric constant than the ceramic insulating layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Electrostatic chuck with high insulation performance and electrostatic attraction force","description":"An electrostatic chuck includes a ceramic base, a ceramic dielectric layer, an electrostatic electrode, and a ceramic insulating layer. The ceramic dielectric layer is positioned on the ceramic base a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11951583","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11951583","citation_suggestion":"Patentable. \"Electrostatic chuck with high insulation performance and electrostatic attraction force\" (US-11951583). https://patentable.app/patents/US-11951583","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11951583","json":"https://patentable.app/api/llm-context/US-11951583","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T11:41:20.020Z"}