{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11959736","patent":{"patent_number":"US-11959736","title":"Method and a system for characterising structures etched in a substrate","assignee":null,"inventors":[],"filing_date":"2023-05-17T00:00:00.000Z","publication_date":"2024-04-16T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":15,"abstract":"A method for characterising high aspect ratio (“HAR”) structures etched in a substrate includes, for at least one structure, an interferometric measurement step, carried out with a low-coherence interferometer positioned on a top surface of the substrate, for measuring with a measurement beam, at least one depth data relating to a depth of the HAR structure, and a first adjusting step for adjusting a diameter, at the top surface, of the measurement beam according to at least one top critical dimension (“top-CD”) data relating to a width of the HAR structure."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and a system for characterising structures etched in a substrate","description":"A method for characterising high aspect ratio (“HAR”) structures etched in a substrate includes, for at least one structure, an interferometric measurement step, carried out with a low-coherence inter","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11959736","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11959736","citation_suggestion":"Patentable. \"Method and a system for characterising structures etched in a substrate\" (US-11959736). https://patentable.app/patents/US-11959736","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11959736","json":"https://patentable.app/api/llm-context/US-11959736","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T02:40:51.288Z"}