{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11959852","patent":{"patent_number":"US-11959852","title":"Method for determining properties of a sample by ellipsometry","assignee":null,"inventors":[],"filing_date":"2020-01-23T00:00:00.000Z","publication_date":"2024-04-16T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":10,"abstract":"A method for determining properties of a sample (12) by ellipsometry includes positioning the sample (12) in an ellipsometer (10) so that a surface normal (n) of a measurement region of the sample surface is tilted relative to a reference axis (z) of the ellipsometer (10) and measuring a Mueller matrix for the measurement region. The method then includes creating an equation system by equating the measured Mueller matrix and a matrix product formed of: a rotation matrix about an input rotation angle (γ); an isotropic Mueller matrix in normalized NCS form and a rotation matrix about an output rotation angle (−δ). The method then solves the equation system for the parameters representing the sample properties to be determined. The input rotation angle (γ) and the output rotation angle (−δ) are set as parameters independent of one another when setting up the equation system."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for determining properties of a sample by ellipsometry","description":"A method for determining properties of a sample (12) by ellipsometry includes positioning the sample (12) in an ellipsometer (10) so that a surface normal (n) of a measurement region of the sample sur","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11959852","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11959852","citation_suggestion":"Patentable. \"Method for determining properties of a sample by ellipsometry\" (US-11959852). https://patentable.app/patents/US-11959852","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11959852","json":"https://patentable.app/api/llm-context/US-11959852","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:12:57.859Z"}