{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11960202","patent":{"patent_number":"US-11960202","title":"EUV mask defect tool apparatus","assignee":null,"inventors":[],"filing_date":"2021-10-15T00:00:00.000Z","publication_date":"2024-04-16T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N"],"num_claims":10,"abstract":"An EUV microscope device utilizing a source of a beam of EUV light. The light is sent to a collector which produces a first focused EUV beam. A monochromator receives the first focused EUV beam and produces a second EUV beam that is passed to an illumination module. The output of the illumination module is passed to a mask. The reflected beam from the mask is sent to a zone plate and a detector to produce an image."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"EUV mask defect tool apparatus","description":"An EUV microscope device utilizing a source of a beam of EUV light. The light is sent to a collector which produces a first focused EUV beam. A monochromator receives the first focused EUV beam and pr","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11960202","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11960202","citation_suggestion":"Patentable. \"EUV mask defect tool apparatus\" (US-11960202). https://patentable.app/patents/US-11960202","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11960202","json":"https://patentable.app/api/llm-context/US-11960202","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T01:51:06.611Z"}