{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11966166","patent":{"patent_number":"US-11966166","title":"Measurement apparatus and a method for determining a substrate grid","assignee":null,"inventors":[],"filing_date":"2021-07-16T00:00:00.000Z","publication_date":"2024-04-23T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":20,"abstract":"A measurement apparatus and method for determining a substrate grid describing a deformation of a substrate prior to exposure of the substrate in a lithographic apparatus configured to fabricate one or more features on the substrate. Position data for a plurality of first features and/or a plurality of second features on the substrate is obtained. Asymmetry data for at least a feature of the plurality of first features and/or the plurality of second features is obtained. The substrate grid based on the position data and the asymmetry data is determined. The substrate grid and asymmetry data are passed to the lithographic apparatus for controlling at least part of an exposure process to fabricate one or more features on the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Measurement apparatus and a method for determining a substrate grid","description":"A measurement apparatus and method for determining a substrate grid describing a deformation of a substrate prior to exposure of the substrate in a lithographic apparatus configured to fabricate one o","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11966166","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11966166","citation_suggestion":"Patentable. \"Measurement apparatus and a method for determining a substrate grid\" (US-11966166). https://patentable.app/patents/US-11966166","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11966166","json":"https://patentable.app/api/llm-context/US-11966166","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:14:16.252Z"}