{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11966171","patent":{"patent_number":"US-11966171","title":"Method for producing overlay results with absolute reference for semiconductor manufacturing","assignee":null,"inventors":[],"filing_date":"2021-08-17T00:00:00.000Z","publication_date":"2024-04-23T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06V","H01L","H01L","G01N","G06T","G06T","G06T","G06T","G06V","H01L","H04N"],"num_claims":20,"abstract":"A method of processing a wafer is provided. The method includes providing a reference pattern for patterning a wafer. The reference pattern is independent of a working surface of the wafer. A placement of a first pattern on the working surface of the wafer is determined by identifying the reference pattern to align the first pattern. The first pattern is formed on the working surface of the wafer based on the placement."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for producing overlay results with absolute reference for semiconductor manufacturing","description":"A method of processing a wafer is provided. The method includes providing a reference pattern for patterning a wafer. The reference pattern is independent of a working surface of the wafer. A placemen","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11966171","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11966171","citation_suggestion":"Patentable. \"Method for producing overlay results with absolute reference for semiconductor manufacturing\" (US-11966171). https://patentable.app/patents/US-11966171","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11966171","json":"https://patentable.app/api/llm-context/US-11966171","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T11:54:09.432Z"}