{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11967514","patent":{"patent_number":"US-11967514","title":"Apparatus and method for controlling process","assignee":null,"inventors":[],"filing_date":"2021-01-19T00:00:00.000Z","publication_date":"2024-04-23T00:00:00.000Z","cpc_codes":["B25J","H01L","G05B","H01L","H01L","H01L","H01L","H01L","G05B","G05B","G05B"],"num_claims":15,"abstract":"An apparatus and a method for controlling a process are provided. An apparatus for controlling a process includes a processor, and a memory for storing a plurality of instructions executed by the processor, in which the plurality of instructions include an instruction for determining deviation tendency of a seating point of a substrate with respect to a seating center point of a substrate support based on a seating point data created by accumulating the seating points of the substrate seated on the substrate support, an instruction for determining an alarm level according to the determined deviation tendency, and an instruction for performing post-processing according to the determined alarm level, in which the seating point data includes a change of the seating point over time."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for controlling process","description":"An apparatus and a method for controlling a process are provided. An apparatus for controlling a process includes a processor, and a memory for storing a plurality of instructions executed by the proc","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11967514","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11967514","citation_suggestion":"Patentable. \"Apparatus and method for controlling process\" (US-11967514). https://patentable.app/patents/US-11967514","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11967514","json":"https://patentable.app/api/llm-context/US-11967514","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T10:38:56.505Z"}