{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11968771","patent":{"patent_number":"US-11968771","title":"Voltage waveform generator for plasma processing apparatuses","assignee":null,"inventors":[],"filing_date":"2019-11-06T00:00:00.000Z","publication_date":"2024-04-23T00:00:00.000Z","cpc_codes":["H02M","H02M","H02M","H02M"],"num_claims":20,"abstract":"A plasma processing apparatus may include a mechanism for generating a plasma, a processing platform for supporting a substrate to be processed, and a voltage waveform generator having an output electrically coupled to the processing platform. The voltage waveform generator includes a plurality of first buck converters arranged in parallel and coupled to the output. The first buck converters include actively switchable semiconductor switches. A control unit is configured to operate the actively switchable semiconductor switches through pulse width modulation signals, and the control unit is configured to operate the plurality of first buck converters in an interleaved manner."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Voltage waveform generator for plasma processing apparatuses","description":"A plasma processing apparatus may include a mechanism for generating a plasma, a processing platform for supporting a substrate to be processed, and a voltage waveform generator having an output elect","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11968771","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11968771","citation_suggestion":"Patentable. \"Voltage waveform generator for plasma processing apparatuses\" (US-11968771). https://patentable.app/patents/US-11968771","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11968771","json":"https://patentable.app/api/llm-context/US-11968771","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T18:35:38.001Z"}