{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11972936","patent":{"patent_number":"US-11972936","title":"Shielding device and thin-film-deposition equipment with the same","assignee":null,"inventors":[],"filing_date":"2021-12-29T00:00:00.000Z","publication_date":"2024-04-30T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A thin-film-deposition equipment with shielding device, which includes a reaction chamber, a carrier, a shielding device and two optical sensors. The carrier and a portion of the shielding device are disposed within the reaction chamber. The shielding device includes two shield members, and at least one driver interconnecting to drive the two shield members to sway in opposite directions and switch between an open state and a shielding state. Each of the two shield members is disposed with a shield protrusion and a sensing region adjacent to each other. The shield protrusion is for shielding the sensing region from contaminants, thereby the optical sensors can accurately detect locations of the shield members."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Shielding device and thin-film-deposition equipment with the same","description":"A thin-film-deposition equipment with shielding device, which includes a reaction chamber, a carrier, a shielding device and two optical sensors. The carrier and a portion of the shielding device are ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11972936","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11972936","citation_suggestion":"Patentable. \"Shielding device and thin-film-deposition equipment with the same\" (US-11972936). https://patentable.app/patents/US-11972936","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11972936","json":"https://patentable.app/api/llm-context/US-11972936","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T14:38:02.898Z"}