{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11973107","patent":{"patent_number":"US-11973107","title":"Manufacturing method of semiconductor super-junction device","assignee":null,"inventors":[],"filing_date":"2020-11-10T00:00:00.000Z","publication_date":"2024-04-30T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":8,"abstract":"A manufacturing method of a semiconductor super-junction device includes the following steps: An n-type substrate is etched in a self-aligning manner using a first insulating layer and a second insulating layer as a mask to form a second groove in the n-type substrate. A gate structure is formed in the second groove."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Manufacturing method of semiconductor super-junction device","description":"A manufacturing method of a semiconductor super-junction device includes the following steps: An n-type substrate is etched in a self-aligning manner using a first insulating layer and a second insula","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11973107","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11973107","citation_suggestion":"Patentable. \"Manufacturing method of semiconductor super-junction device\" (US-11973107). https://patentable.app/patents/US-11973107","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11973107","json":"https://patentable.app/api/llm-context/US-11973107","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:14:15.994Z"}