{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11977035","patent":{"patent_number":"US-11977035","title":"Surface shape detection device and detection method","assignee":null,"inventors":[],"filing_date":"2019-04-08T00:00:00.000Z","publication_date":"2024-05-07T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":11,"abstract":"A surface shape detection device using differential interference optics achieves restoration error reduction of a surface shape while maintaining resolution. The surface shape detection device includes: a light spot scanning unit such as a wafer rotation direction drive unit that scans a wafer surface with a light spot; an interference light detection mechanism such as a differential interference optical system that detects interference light of light obtained by scanning a surface of an inspection target with a plurality of the light spots separated by a predetermined design distance; and a surface shape restoration processing unit such as a wafer surface shape restoration unit that samples, at a predetermined quantization time interval, and calculates information of the interference light, and performs restoration processing on a surface shape of the wafer, in which the predetermined design distance is larger than a quantization distance interval corresponding to the predetermined quantization time interval."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Surface shape detection device and detection method","description":"A surface shape detection device using differential interference optics achieves restoration error reduction of a surface shape while maintaining resolution. The surface shape detection device include","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11977035","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11977035","citation_suggestion":"Patentable. \"Surface shape detection device and detection method\" (US-11977035). https://patentable.app/patents/US-11977035","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11977035","json":"https://patentable.app/api/llm-context/US-11977035","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:57:14.209Z"}