{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11978742","patent":{"patent_number":"US-11978742","title":"Metal oxide film and method for forming metal oxide film","assignee":null,"inventors":[],"filing_date":"2023-04-20T00:00:00.000Z","publication_date":"2024-05-07T00:00:00.000Z","cpc_codes":["G01N","G02F","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":28,"abstract":"A metal oxide film including a crystal part and having highly stable physical properties is provided. The size of the crystal part is less than or equal to 10 nm, which allows the observation of circumferentially arranged spots in a nanobeam electron diffraction pattern of the cross section of the metal oxide film when the measurement area is greater than or equal to 5 nmφ and less than or equal to 10 nmφ."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Metal oxide film and method for forming metal oxide film","description":"A metal oxide film including a crystal part and having highly stable physical properties is provided. The size of the crystal part is less than or equal to 10 nm, which allows the observation of circu","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11978742","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11978742","citation_suggestion":"Patentable. \"Metal oxide film and method for forming metal oxide film\" (US-11978742). https://patentable.app/patents/US-11978742","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11978742","json":"https://patentable.app/api/llm-context/US-11978742","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T03:24:08.063Z"}