{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11982016","patent":{"patent_number":"US-11982016","title":"Method for growing beta-Ga2O3-based single crystal film, and crystalline layered structure","assignee":null,"inventors":[],"filing_date":"2021-09-10T00:00:00.000Z","publication_date":"2024-05-14T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":5,"abstract":"As one embodiment, the present invention provides a method for growing a β-Ga2O3-based single crystal film by using HYPE method. The method includes a step of exposing a Ga2O3-based substrate to a gallium chloride-based gas and an oxygen-including gas, and growing a β-Ga2O3-based single crystal film on a principal surface of the Ga2O3-based substrate at a growth temperature of not lower than 900° C."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for growing beta-Ga2O3-based single crystal film, and crystalline layered structure","description":"As one embodiment, the present invention provides a method for growing a β-Ga2O3-based single crystal film by using HYPE method. The method includes a step of exposing a Ga2O3-based substrate to a gal","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11982016","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11982016","citation_suggestion":"Patentable. \"Method for growing beta-Ga2O3-based single crystal film, and crystalline layered structure\" (US-11982016). https://patentable.app/patents/US-11982016","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11982016","json":"https://patentable.app/api/llm-context/US-11982016","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T00:11:53.301Z"}