{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11982980","patent":{"patent_number":"US-11982980","title":"Simulation method for semiconductor fabrication process and method for manufacturing semiconductor device","assignee":null,"inventors":[],"filing_date":"2021-04-14T00:00:00.000Z","publication_date":"2024-05-14T00:00:00.000Z","cpc_codes":["G05B","G06F","G05B","G06F","G06N","G06N"],"num_claims":18,"abstract":"According to an aspect of the present inventive concept, a simulation method for a semiconductor fabrication process includes obtaining, as input data, process parameters for controlling a semiconductor process of manufacturing semiconductor devices, or design parameters representing a structure of the semiconductor devices, or both the process parameters and the design parameters; generating predictive data for electrical characteristics of the semiconductor devices using a machine learning model based on the input data; generating reference data for the electrical characteristics of the semiconductor devices using a simulation tool based on the input data; and training the machine learning model using the predictive data and the reference data."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Simulation method for semiconductor fabrication process and method for manufacturing semiconductor device","description":"According to an aspect of the present inventive concept, a simulation method for a semiconductor fabrication process includes obtaining, as input data, process parameters for controlling a semiconduct","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11982980","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11982980","citation_suggestion":"Patentable. \"Simulation method for semiconductor fabrication process and method for manufacturing semiconductor device\" (US-11982980). https://patentable.app/patents/US-11982980","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11982980","json":"https://patentable.app/api/llm-context/US-11982980","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T18:37:18.866Z"}