{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11984308","patent":{"patent_number":"US-11984308","title":"Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer","assignee":null,"inventors":[],"filing_date":"2020-11-12T00:00:00.000Z","publication_date":"2024-05-14T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":9,"abstract":"A method for measuring the concentration of fluorine gas (F2) contained in a halogen fluoride-containing gas using an analysis apparatus having a halogen fluoride-containing gas supply source, a fluorine-containing gas supply source, a tube, a capillary, and a mass spectrometer, the method including, before measuring the concentration of fluorine gas, performing passivation treatment on the tube and the capillary using a passivation gas containing a fluorine-containing gas supplied from the fluorine-containing gas supply source."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer","description":"A method for measuring the concentration of fluorine gas (F2) contained in a halogen fluoride-containing gas using an analysis apparatus having a halogen fluoride-containing gas supply source, a fluor","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11984308","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11984308","citation_suggestion":"Patentable. \"Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer\" (US-11984308). https://patentable.app/patents/US-11984308","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11984308","json":"https://patentable.app/api/llm-context/US-11984308","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T08:35:46.628Z"}