{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11988502","patent":{"patent_number":"US-11988502","title":"Characterizing and measuring in small boxes using XPS with multiple measurements","assignee":null,"inventors":[],"filing_date":"2022-10-24T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N","G01N","H01L"],"num_claims":17,"abstract":"A system to characterize a film layer within a measurement box is disclosed. The system obtains a first mixing fraction corresponding to a first X-ray beam, the mixing fraction represents a fraction of the first X-ray beam inside a measurement box of a wafer sample, the measurement box represents a bore structure disposed over a substrate and having a film layer disposed inside the bore structure. The system obtains a contribution value for the measurement box corresponding to the first X-ray beam, the contribution value representing a species signal outside the measurement box that contributes to a same species signal inside the measurement box. The system obtains a first measurement detection signal corresponding to a measurement of the measurement box using the first X-ray beam. The system determines a measurement value of the film layer based on the first measurement detection signal, the contribution value, and the first mixing fraction."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Characterizing and measuring in small boxes using XPS with multiple measurements","description":"A system to characterize a film layer within a measurement box is disclosed. The system obtains a first mixing fraction corresponding to a first X-ray beam, the mixing fraction represents a fraction o","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11988502","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11988502","citation_suggestion":"Patentable. \"Characterizing and measuring in small boxes using XPS with multiple measurements\" (US-11988502). https://patentable.app/patents/US-11988502","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11988502","json":"https://patentable.app/api/llm-context/US-11988502","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T14:37:56.044Z"}