{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11988611","patent":{"patent_number":"US-11988611","title":"Systems for parsing material properties from within SHG signals","assignee":null,"inventors":[],"filing_date":"2021-11-12T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["G01N","G01N","H01L","G01N"],"num_claims":18,"abstract":"Semiconductor metrology systems based on directing radiation on a wafer, detecting second harmonic generated (SHG) radiation from the wafer and correlating the second harmonic generated (SHG) signal to one or more electrical properties of the wafer are disclosed. The disclosure also includes parsing the SHG signal to remove contribution to the SHG signal from one or more material properties of the sample such as thickness. Systems and methods described herein include machine learning methodologies to automatically classify obtained SHG signal"},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems for parsing material properties from within SHG signals","description":"Semiconductor metrology systems based on directing radiation on a wafer, detecting second harmonic generated (SHG) radiation from the wafer and correlating the second harmonic generated (SHG) signal t","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11988611","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11988611","citation_suggestion":"Patentable. \"Systems for parsing material properties from within SHG signals\" (US-11988611). https://patentable.app/patents/US-11988611","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11988611","json":"https://patentable.app/api/llm-context/US-11988611","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T10:40:29.106Z"}