{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11988613","patent":{"patent_number":"US-11988613","title":"Care area based defect detection","assignee":null,"inventors":[],"filing_date":"2022-02-14T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["G01N","G06T","G06T","G01N","G06T","G06T"],"num_claims":20,"abstract":"There is provided a system and method of assisting defect detection on a semiconductor specimen. The method includes obtaining a first map informative of multiple care areas (CAs) to be inspected on a die; creating a plurality of bounding rectangles (BRs) enclosing the multiple CAs; and compacting the plurality of BRs to a set of compacted rectangles to meet a predefined inspection capacity while attempting to minimize a non-CA area enclosed by the set of compacted rectangles, giving rise to a second map informative of the set of compacted rectangles. The compaction comprises constructing an R-tree structure representative of the plurality of BRs and compacted rectangles, and selecting a set of nodes from the R-tree structure based on the predefined inspection capacity and representative of the set of compacted rectangles. The second map is usable for filtering a defect map indicative of defect candidate distribution on the die."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Care area based defect detection","description":"There is provided a system and method of assisting defect detection on a semiconductor specimen. The method includes obtaining a first map informative of multiple care areas (CAs) to be inspected on a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11988613","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11988613","citation_suggestion":"Patentable. \"Care area based defect detection\" (US-11988613). https://patentable.app/patents/US-11988613","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11988613","json":"https://patentable.app/api/llm-context/US-11988613","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T14:38:06.459Z"}