{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11988968","patent":{"patent_number":"US-11988968","title":"Method for detecting overlay precision and method for compensating overlay deviation","assignee":null,"inventors":[],"filing_date":"2020-10-01T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["H01L","G06T","G06T","H01L","H01L","G06T","G06T","H01L"],"num_claims":18,"abstract":"A method for detecting an overlay precision and a method for compensating an overlay deviation are provided. The method for detecting the overlay precision includes providing a wafer to-be-detected, where the wafer to-be-detected includes a photoresist layer which has been exposed and developed; performing a first detection on the wafer to-be-detected using an optical overlay precision measurement and acquiring first overlay precision information of the photoresist layer; performing a second detection on the wafer to-be-detected using the optical overlay precision measurement, and acquiring second overlay precision information of the photoresist layer, where a wavelength or a polarization direction of a light source of the second detection is different from a wavelength or a polarization direction of a light source of the first detection; and acquiring overlay precision deviation information of the wafer to-be-detected according to the first overlay precision information and the second overlay precision information."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for detecting overlay precision and method for compensating overlay deviation","description":"A method for detecting an overlay precision and a method for compensating an overlay deviation are provided. The method for detecting the overlay precision includes providing a wafer to-be-detected, w","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11988968","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11988968","citation_suggestion":"Patentable. \"Method for detecting overlay precision and method for compensating overlay deviation\" (US-11988968). https://patentable.app/patents/US-11988968","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11988968","json":"https://patentable.app/api/llm-context/US-11988968","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T03:57:57.510Z"}