{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11989876","patent":{"patent_number":"US-11989876","title":"Method and apparatus for inspecting pattern collapse defects","assignee":null,"inventors":[],"filing_date":"2023-05-05T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["G06N","G06T","G06N","G06N","G06T","G06T","G06N","G06T","G06T","G06T","G06T","G06T"],"num_claims":10,"abstract":"A method for detecting defects on a sample based on a defect inspection apparatus is provided. In the method, an image data set that includes defect data and non-defect data is organized. A convolutional neural network (CNN) model is defined. The CNN model is trained based on the image data set. The defects on the sample are detected based on inspection data of the defect inspection apparatus and the CNN model. The sample includes uniformly repeating structures, and the inspection data of the defect inspection apparatus is generated by filtering out signals of the uniformly repeating structures of the sample."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and apparatus for inspecting pattern collapse defects","description":"A method for detecting defects on a sample based on a defect inspection apparatus is provided. In the method, an image data set that includes defect data and non-defect data is organized. A convolutio","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11989876","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11989876","citation_suggestion":"Patentable. \"Method and apparatus for inspecting pattern collapse defects\" (US-11989876). https://patentable.app/patents/US-11989876","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11989876","json":"https://patentable.app/api/llm-context/US-11989876","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T03:23:40.264Z"}