{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11990324","patent":{"patent_number":"US-11990324","title":"Adaptive predictive control system","assignee":null,"inventors":[],"filing_date":"2022-03-03T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B","H01L","H01L"],"num_claims":18,"abstract":"This disclosure describes systems, methods, and apparatus for a plasma processing system. A method comprises receiving a reference signal defining target values for a parameter that is controlled at an output within the plasma processing system, obtaining a measure of the parameter that is controlled at the output, and calculating a delay between the target values of the setpoint signal and corresponding actual parameter values achieved at the output. The method also comprises providing, based upon the delay, a time-shifted amplitude error indicative of an error between the target values and the actual parameter values and adjusting at least one actuator, based upon the delay and the time-shifted amplitude error, in advance of when an actual parameter value is desired at an actuator output of the at least one actuator while maintaining the output within a threshold range."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Adaptive predictive control system","description":"This disclosure describes systems, methods, and apparatus for a plasma processing system. A method comprises receiving a reference signal defining target values for a parameter that is controlled at a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11990324","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11990324","citation_suggestion":"Patentable. \"Adaptive predictive control system\" (US-11990324). https://patentable.app/patents/US-11990324","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11990324","json":"https://patentable.app/api/llm-context/US-11990324","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:42:42.835Z"}