{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11990331","patent":{"patent_number":"US-11990331","title":"Method for forming silicon dioxide film and method for forming metal gate","assignee":null,"inventors":[],"filing_date":"2021-08-10T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":18,"abstract":"A method for forming a silicon dioxide film and a method for forming a metal gate are provided. The method for forming a silicon dioxide film includes: forming a silicon dioxide layer on a semiconductor substrate, performing a nitrogen treatment to the silicon dioxide layer to convert the silicon dioxide layer of partial thickness into a mixed layer of silicon nitride and silicon oxynitride; and removing the mixed layer to form a silicon dioxide film on the semiconductor substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for forming silicon dioxide film and method for forming metal gate","description":"A method for forming a silicon dioxide film and a method for forming a metal gate are provided. The method for forming a silicon dioxide film includes: forming a silicon dioxide layer on a semiconduct","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11990331","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11990331","citation_suggestion":"Patentable. \"Method for forming silicon dioxide film and method for forming metal gate\" (US-11990331). https://patentable.app/patents/US-11990331","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11990331","json":"https://patentable.app/api/llm-context/US-11990331","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T00:12:35.377Z"}