{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11990371","patent":{"patent_number":"US-11990371","title":"Device chip manufacturing method","assignee":null,"inventors":[],"filing_date":"2021-09-14T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":4,"abstract":"A device chip manufacturing method for dividing a silicon wafer formed with devices in each of regions of a front surface partitioned by a plurality of streets includes coating the front surface of the silicon wafer with a resist film, exposing the silicon wafer by removing the resist film in regions along the streets, forming deep grooves by alternately repeating isotropic etching and coating with a passivation film, and subjecting bottom portions of the deep grooves to anisotropic etching to form division grooves, thereby dividing the silicon wafer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Device chip manufacturing method","description":"A device chip manufacturing method for dividing a silicon wafer formed with devices in each of regions of a front surface partitioned by a plurality of streets includes coating the front surface of th","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11990371","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11990371","citation_suggestion":"Patentable. \"Device chip manufacturing method\" (US-11990371). https://patentable.app/patents/US-11990371","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11990371","json":"https://patentable.app/api/llm-context/US-11990371","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:40:19.109Z"}