{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11990409","patent":{"patent_number":"US-11990409","title":"Semiconductor device with fine metal lines for BEOL structure and method of manufacturing the same","assignee":null,"inventors":[],"filing_date":"2021-06-22T00:00:00.000Z","publication_date":"2024-05-21T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":14,"abstract":"Provided is a semiconductor device including a front-end-of-line (FEOL) structure and a back-end-of-line (BEOL) structure connected to the FEOL structure, wherein the FEOL structure includes at least one source/drain region and at least one gate structure, and the BEOL structure includes: a plurality of 1st fine metal lines arranged in a row with a same pitch, each of the plurality of 1st fine metal lines having a same width; and at least one 1st wide metal line formed at a side of the plurality of 1st fine metal lines, the 1st wide metal line having a width greater than the width of the 1st fine metal line, and wherein each of the plurality of 1st fine metal lines includes a material different from a material included in the 1st wide metal line."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor device with fine metal lines for BEOL structure and method of manufacturing the same","description":"Provided is a semiconductor device including a front-end-of-line (FEOL) structure and a back-end-of-line (BEOL) structure connected to the FEOL structure, wherein the FEOL structure includes at least ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11990409","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11990409","citation_suggestion":"Patentable. \"Semiconductor device with fine metal lines for BEOL structure and method of manufacturing the same\" (US-11990409). https://patentable.app/patents/US-11990409","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11990409","json":"https://patentable.app/api/llm-context/US-11990409","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T12:46:59.205Z"}