{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11993509","patent":{"patent_number":"US-11993509","title":"MEMS inclinometer having a reduced vibration rectification error","assignee":null,"inventors":[],"filing_date":"2021-02-18T00:00:00.000Z","publication_date":"2024-05-28T00:00:00.000Z","cpc_codes":["G01C","G01C","G01C"],"num_claims":20,"abstract":"A MEMS inclinometer includes a substrate, a first mobile mass and a sensing unit. The sensing unit includes a second mobile mass, a number of elastic elements, which are interposed between the second mobile mass and the substrate and are compliant in a direction parallel to a first axis, and a number of elastic structures, each of which is interposed between the first and second mobile masses and is compliant in a direction parallel to the first axis and to a second axis. The sensing unit further includes a fixed electrode that is fixed with respect to the substrate and a mobile electrode fixed with respect to the second mobile mass, which form a variable capacitor."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"MEMS inclinometer having a reduced vibration rectification error","description":"A MEMS inclinometer includes a substrate, a first mobile mass and a sensing unit. The sensing unit includes a second mobile mass, a number of elastic elements, which are interposed between the second ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11993509","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11993509","citation_suggestion":"Patentable. \"MEMS inclinometer having a reduced vibration rectification error\" (US-11993509). https://patentable.app/patents/US-11993509","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11993509","json":"https://patentable.app/api/llm-context/US-11993509","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T08:08:02.501Z"}