{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11996313","patent":{"patent_number":"US-11996313","title":"Member for semiconductor manufacturing apparatus","assignee":null,"inventors":[],"filing_date":"2021-12-15T00:00:00.000Z","publication_date":"2024-05-28T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":8,"abstract":"A member for semiconductor manufacturing apparatus has a structure in which a hollow ceramic shaft is provided on a back surface of a ceramic plate having a front surface serving as a wafer placement surface. The member for semiconductor manufacturing apparatus includes an RF electrode embedded in the ceramic plate, an RF connector disposed outside of the hollow interior of the ceramic shaft, and an RF link member provided between the RF connector and the RF electrode. The RF link member has a branching portion consisting of a plurality of RF rods, and the branching portion extends to the outside of the ceramic shaft."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Member for semiconductor manufacturing apparatus","description":"A member for semiconductor manufacturing apparatus has a structure in which a hollow ceramic shaft is provided on a back surface of a ceramic plate having a front surface serving as a wafer placement ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11996313","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11996313","citation_suggestion":"Patentable. \"Member for semiconductor manufacturing apparatus\" (US-11996313). https://patentable.app/patents/US-11996313","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11996313","json":"https://patentable.app/api/llm-context/US-11996313","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T18:39:10.723Z"}