{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11996337","patent":{"patent_number":"US-11996337","title":"Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium","assignee":null,"inventors":[],"filing_date":"2022-06-09T00:00:00.000Z","publication_date":"2024-05-28T00:00:00.000Z","cpc_codes":["G05B","H01L","G05B","H01L","H01L","G05B"],"num_claims":17,"abstract":"According to one aspect of the technique, there is provided a technique, including: a process chamber in which a substrate is processed; a memory that stores recipe information describing a procedure that executes the processing of the substrate, process data accumulated during the processing of a plurality of substrates, variation quality data calculated from the process data, and comparison data to be compared with the variation quality data; a monitor configured to monitor the process data; an analyzer configured to compare the variation quality data with the comparison data to obtain a reproduction index indicating a reproducibility of the comparison data, and calculate a correction value of setting information included in the recipe information when the reproduction index is smaller than a predetermined value; and a controller configured to be capable of correcting the setting information included in the recipe information with the correction value."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium","description":"According to one aspect of the technique, there is provided a technique, including: a process chamber in which a substrate is processed; a memory that stores recipe information describing a procedure ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11996337","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11996337","citation_suggestion":"Patentable. \"Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium\" (US-11996337). https://patentable.app/patents/US-11996337","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11996337","json":"https://patentable.app/api/llm-context/US-11996337","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:45:47.043Z"}