{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11999877","patent":{"patent_number":"US-11999877","title":"Silicon nitride chemical mechanical polishing slurry with silicon nitride removal rate enhancers and methods of use thereof","assignee":null,"inventors":[],"filing_date":"2022-03-08T00:00:00.000Z","publication_date":"2024-06-04T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":15,"abstract":"The present disclosure relates to relates to silicon nitride (SiN) chemical-mechanical polishing (CMP) compositions with SiN removal rate enhancers. The SiN CMP compositions increase the SiN polishing rate while suppressing the tetratethylorthosilicate (TEOS) polishing rate, thus providing a high SiN/TEOS selectivity ratio and reducing any defects on the surfaces of polished substrates."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Silicon nitride chemical mechanical polishing slurry with silicon nitride removal rate enhancers and methods of use thereof","description":"The present disclosure relates to relates to silicon nitride (SiN) chemical-mechanical polishing (CMP) compositions with SiN removal rate enhancers. The SiN CMP compositions increase the SiN polishing","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11999877","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11999877","citation_suggestion":"Patentable. \"Silicon nitride chemical mechanical polishing slurry with silicon nitride removal rate enhancers and methods of use thereof\" (US-11999877). https://patentable.app/patents/US-11999877","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11999877","json":"https://patentable.app/api/llm-context/US-11999877","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T17:42:33.862Z"}