{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-12000041","patent":{"patent_number":"US-12000041","title":"Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner","assignee":null,"inventors":[],"filing_date":"2023-05-31T00:00:00.000Z","publication_date":"2024-06-04T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","H01L","H01L","H01L","G01N","G01N","G01N"],"num_claims":20,"abstract":"A method includes receiving light, by a light coupling device and along an optical path, reflected back from a reflector mounted on a liner of a processing chamber. The method further includes detecting, by a spectrometer within the received light, a first spectrum representative of a deposited film layer on the reflector. The method further includes aligning, using an alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner","description":"A method includes receiving light, by a light coupling device and along an optical path, reflected back from a reflector mounted on a liner of a processing chamber. The method further includes detecti","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-12000041","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-12000041","citation_suggestion":"Patentable. \"Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner\" (US-12000041). https://patentable.app/patents/US-12000041","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-12000041","json":"https://patentable.app/api/llm-context/US-12000041","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T14:43:22.738Z"}