{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-12001193","patent":{"patent_number":"US-12001193","title":"Apparatus for environmental control of dies and substrates for hybrid bonding","assignee":null,"inventors":[],"filing_date":"2022-03-11T00:00:00.000Z","publication_date":"2024-06-04T00:00:00.000Z","cpc_codes":["G05B","H01L","H01L","H01L","H01L","G05B"],"num_claims":19,"abstract":"Apparatus for extending substrate queue time for hybrid bonding by preserving plasma activation. In some embodiments, the apparatus may include an environmentally controllable space with a support for holding a die or a substrate, a gas velocity accelerator that recirculates one or more gases laterally across the support, a filter, a humidifier apparatus that is fluidly connected to the environmentally controllable space, wherein the humidifier apparatus enables controllable humidity levels within the environmentally controllable space, a pressurizing apparatus fluidly connected to the humidifier apparatus on an output and fluidly connected to at least one gas supply on an input, a relative humidity (RH) sensor positioned within the environmentally controllable space, and an environment controller in communication with at least the humidifier apparatus and the RH sensor, wherein the environment controller is configured to maintain an RH level of approximately 80% to approximately 95%."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus for environmental control of dies and substrates for hybrid bonding","description":"Apparatus for extending substrate queue time for hybrid bonding by preserving plasma activation. In some embodiments, the apparatus may include an environmentally controllable space with a support for","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-12001193","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-12001193","citation_suggestion":"Patentable. \"Apparatus for environmental control of dies and substrates for hybrid bonding\" (US-12001193). https://patentable.app/patents/US-12001193","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-12001193","json":"https://patentable.app/api/llm-context/US-12001193","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:00:35.964Z"}