{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-12002662","patent":{"patent_number":"US-12002662","title":"Electrostatic attraction device and neutralization method","assignee":null,"inventors":[],"filing_date":"2020-03-13T00:00:00.000Z","publication_date":"2024-06-04T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":8,"abstract":"There is provided an electrostatic attraction device having an electrostatic chuck in which an electrode and a heater are embedded in a dielectric. The device comprises: a DC power source unit having a DC power source configured to supply a DC power to the electrode; a first neutralizing circuit connected to a power supply path between the DC power source and the electrode; and a second neutralizing circuit connected to a power supply path between the first neutralizing circuit and the electrode. The first neutralizing circuit has a first ground relay that connects and disconnects the electrode and the ground via a voltage-drop resistance member, and the second neutralizing circuit has an isolation relay that connects and disconnects the first neutralizing circuit and the second neutralizing circuit, and a second ground relay that is connected to a power supply path between the isolation relay and the electrode and connects and disconnects the electrode and the ground side without going through a resistance member."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Electrostatic attraction device and neutralization method","description":"There is provided an electrostatic attraction device having an electrostatic chuck in which an electrode and a heater are embedded in a dielectric. The device comprises: a DC power source unit having ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-12002662","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-12002662","citation_suggestion":"Patentable. \"Electrostatic attraction device and neutralization method\" (US-12002662). https://patentable.app/patents/US-12002662","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-12002662","json":"https://patentable.app/api/llm-context/US-12002662","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T18:03:54.580Z"}