{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-12002682","patent":{"patent_number":"US-12002682","title":"Tip-to-tip graphic preparation method","assignee":null,"inventors":[],"filing_date":"2020-07-23T00:00:00.000Z","publication_date":"2024-06-04T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"The present invention disclosures a Tip-to-Tip pattern preparation method, comprising: providing a substrate, and sequentially forming a layer to be etched, a first hard mask layer, a second hard mask layer, a sacrificial layer, a first dielectric layer and a first photoresist layer on the substrate, forming a first patterned photoresist layer which has a first Tip-to-Tip pattern by EUV lithography, and transferring the first Tip-to-Tip pattern to the second hard mask layer by etching; then forming a second patterned photoresist layer which has a second Tip-to-Tip pattern by the EUV lithography, and transferring the second Tip-to-Tip pattern to the second hard mask layer by etching; finally, transferring the first Tip-to-Tip pattern and the second Tip-to-Tip pattern to the layer to be etched. The above method needs only performing the EUV lithography twice to form the small-sized Tip-to-Tip pattern with a period halved, that is, the EUV lithography and etching are used for reducing lithography layers and realizing to form the small-sized Tip-to-Tip pattern with the period halved."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Tip-to-tip graphic preparation method","description":"The present invention disclosures a Tip-to-Tip pattern preparation method, comprising: providing a substrate, and sequentially forming a layer to be etched, a first hard mask layer, a second hard mask","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-12002682","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-12002682","citation_suggestion":"Patentable. \"Tip-to-tip graphic preparation method\" (US-12002682). https://patentable.app/patents/US-12002682","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-12002682","json":"https://patentable.app/api/llm-context/US-12002682","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T14:37:36.186Z"}