{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-12006572","patent":{"patent_number":"US-12006572","title":"Reactor system including a gas distribution assembly for use with activated species and method of using same","assignee":null,"inventors":[],"filing_date":"2020-10-01T00:00:00.000Z","publication_date":"2024-06-11T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":25,"abstract":"A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and a showerhead plate downstream of the gas distribution device and the expansion area."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Reactor system including a gas distribution assembly for use with activated species and method of using same","description":"A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-12006572","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-12006572","citation_suggestion":"Patentable. \"Reactor system including a gas distribution assembly for use with activated species and method of using same\" (US-12006572). https://patentable.app/patents/US-12006572","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-12006572","json":"https://patentable.app/api/llm-context/US-12006572","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:45:18.424Z"}