{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-12009263","patent":{"patent_number":"US-12009263","title":"Methods of reducing parasitic capacitance in semiconductor devices","assignee":null,"inventors":[],"filing_date":"2021-06-17T00:00:00.000Z","publication_date":"2024-06-11T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A semiconductor structure includes a source/drain (S/D) feature disposed adjacent to a metal gate structure (MG), an S/D contact disposed over the S/D feature, and a dielectric layer disposed over the S/D contact, where the S/D feature and the S/D contact are separated from the MG by a first air gap, where the dielectric layer partially fills the first air gap, and where a bottom portion of a bottom surface of the S/D contact is separated from a top portion of the S/D feature by a second air gap that is connected to the first air gap."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods of reducing parasitic capacitance in semiconductor devices","description":"A semiconductor structure includes a source/drain (S/D) feature disposed adjacent to a metal gate structure (MG), an S/D contact disposed over the S/D feature, and a dielectric layer disposed over the","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-12009263","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-12009263","citation_suggestion":"Patentable. \"Methods of reducing parasitic capacitance in semiconductor devices\" (US-12009263). https://patentable.app/patents/US-12009263","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-12009263","json":"https://patentable.app/api/llm-context/US-12009263","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:31:09.865Z"}