{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-12010425","patent":{"patent_number":"US-12010425","title":"Overlay measurement device and method for controlling focus movement and program storage medium therefor","assignee":null,"inventors":[],"filing_date":"2023-06-02T00:00:00.000Z","publication_date":"2024-06-11T00:00:00.000Z","cpc_codes":["H04N","H04N"],"num_claims":22,"abstract":"There is provided an overlay measurement device controlling a focus movement, which includes: a lighting part being configured to orient lighting toward an overlay measurement target; a collection part comprising an objective lens and a detector for obtaining one or more of images of each focus in the overlay measurement target; a lens focus actuator moving the objective lens to adjust a distance between the objective lens and a wafer; and a processor controlling an operation of the lens focus actuator. The processor obtains a focus graph respectively in relation to two layers from one or more of the images of each focus, and the processor identifies a reference focus in relation to the obtained focus graphs to move the objective lens."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Overlay measurement device and method for controlling focus movement and program storage medium therefor","description":"There is provided an overlay measurement device controlling a focus movement, which includes: a lighting part being configured to orient lighting toward an overlay measurement target; a collection par","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-12010425","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-12010425","citation_suggestion":"Patentable. \"Overlay measurement device and method for controlling focus movement and program storage medium therefor\" (US-12010425). https://patentable.app/patents/US-12010425","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-12010425","json":"https://patentable.app/api/llm-context/US-12010425","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T10:40:00.781Z"}