{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8463419","patent":{"patent_number":"US-8463419","title":"System and method for improved automated semiconductor wafer manufacturing","assignee":null,"inventors":[],"filing_date":"2009-11-12T00:00:00.000Z","publication_date":"2013-06-11T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B","G05B"],"num_claims":17,"abstract":"System and method for automated semiconductor manufacturing is provided. In accordance with one aspect of the present invention, a system for automated semiconductor wafer manufacturing includes a smart overlay control (SOC) database having empirical alignment data related to overlay alignment, and a simulation module communicatively coupled to the SOC database, the simulation module determining a simulated overlay alignment of a wafer on the plurality of photolithography tools in a tool bank based on the empirical alignment data stored in the SOC database. The system also includes a dispatch module communicatively coupled to the SOC database and the simulation module, the dispatch module controlling the dispatch of a wafer to one of a plurality of photolithography tools in a tool bank based at least in part on the simulated overlay alignment."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System and method for improved automated semiconductor wafer manufacturing","description":"System and method for automated semiconductor manufacturing is provided. In accordance with one aspect of the present invention, a system for automated semiconductor wafer manufacturing includes a sma","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8463419","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8463419","citation_suggestion":"Patentable. \"System and method for improved automated semiconductor wafer manufacturing\" (US-8463419). https://patentable.app/patents/US-8463419","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8463419","json":"https://patentable.app/api/llm-context/US-8463419","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:24:02.163Z"}