{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8464585","patent":{"patent_number":"US-8464585","title":"Combined MEMS accelerometer and gyroscope","assignee":null,"inventors":[],"filing_date":"2008-10-20T00:00:00.000Z","publication_date":"2013-06-18T00:00:00.000Z","cpc_codes":["G01C","G01C"],"num_claims":29,"abstract":"A MEMS structure for a combined gyroscope and accelerometer unit (100) based on in-plane vibratory movements comprises a proof mass (101) and comb-drives (102) operable to cause the proof mass (101) to resonate in the x-direction, commonly referred to as the primary mode. Under the influence of a rotation Ωz around the z-axis, a Coriolis force acting in the y-direction results. This excites the secondary (or sense) mode. A set of parallel-plate capacitors 103 are provided to enable position readout along the secondary axis. In addition to the above, the comb-drive capacitors (102) of the primary mode can also be used for readout of position along the primary axis, and the parallel-plate capacitors (103) for actuation along the secondary axis. This can be achieved either by time-multiplexing these capacitors (102, 103) or by providing separate sets of capacitors (102, 103) for sensing and actuation along each axis. The unit can operate in separate ΣΔ force-feedback loops with respect to both axes. This force-feedback approach is already known for readout of the secondary mode of MEMS gyroscopes. It has not previously been applied to the primary mode of a gyroscope for the measurement of a component of acceleration."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Combined MEMS accelerometer and gyroscope","description":"A MEMS structure for a combined gyroscope and accelerometer unit (100) based on in-plane vibratory movements comprises a proof mass (101) and comb-drives (102) operable to cause the proof mass (101) t","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8464585","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8464585","citation_suggestion":"Patentable. \"Combined MEMS accelerometer and gyroscope\" (US-8464585). https://patentable.app/patents/US-8464585","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8464585","json":"https://patentable.app/api/llm-context/US-8464585","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:45:05.419Z"}