{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8470678","patent":{"patent_number":"US-8470678","title":"Tensile stress enhancement of nitride film for stressed channel field effect transistor fabrication","assignee":null,"inventors":[],"filing_date":"2011-02-24T00:00:00.000Z","publication_date":"2013-06-25T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A method for inducing a tensile stress in a channel of a field effect transistor (FET) includes forming a nitride film over the FET; forming a contact hole to the FET through the nitride film; and performing ultraviolet (UV) curing of the nitride film after forming the contact hole to the FET through the nitride film, wherein the UV cured nitride film induces the tensile stress in the channel of the FET."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Tensile stress enhancement of nitride film for stressed channel field effect transistor fabrication","description":"A method for inducing a tensile stress in a channel of a field effect transistor (FET) includes forming a nitride film over the FET; forming a contact hole to the FET through the nitride film; and per","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8470678","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8470678","citation_suggestion":"Patentable. \"Tensile stress enhancement of nitride film for stressed channel field effect transistor fabrication\" (US-8470678). https://patentable.app/patents/US-8470678","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8470678","json":"https://patentable.app/api/llm-context/US-8470678","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T21:46:18.127Z"}