{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8470714","patent":{"patent_number":"US-8470714","title":"Method of forming fin structures in integrated circuits","assignee":null,"inventors":[],"filing_date":"2012-05-22T00:00:00.000Z","publication_date":"2013-06-25T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":10,"abstract":"A method of forming fin structure in integrated circuit comprising the steps of forming a plurality of fin structures on a substrate, covering an insulating layer on said substrate, performing a planarization process to expose mask layers, performing a wet etching process to etch said insulating layer, thereby exposing a part of the sidewall of said mask layer, removing said mask layer, and performing a dry etching process to remove pad layer and a part of said insulating layer, thereby exposing the top surface and a part of sidewall of said fin structures."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of forming fin structures in integrated circuits","description":"A method of forming fin structure in integrated circuit comprising the steps of forming a plurality of fin structures on a substrate, covering an insulating layer on said substrate, performing a plana","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8470714","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8470714","citation_suggestion":"Patentable. \"Method of forming fin structures in integrated circuits\" (US-8470714). https://patentable.app/patents/US-8470714","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8470714","json":"https://patentable.app/api/llm-context/US-8470714","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T14:58:59.095Z"}