{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8471304","patent":{"patent_number":"US-8471304","title":"Method, apparatus, and system for micromechanical gas chemical sensing capacitor","assignee":null,"inventors":[],"filing_date":"2011-06-03T00:00:00.000Z","publication_date":"2013-06-25T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":17,"abstract":"A method for fabrication of capacitive environment sensors is provided in which the sensor elements are integrated in a CMOS structure with electronics through the use of complementary metal oxide semiconductor (CMOS) fabrication methods. Also provided are environment sensors fabricated, for example, by the method, and a measurement system using the environment sensors fabricated by the method. The described method includes etching away one of the metal layers in a CMOS chip to create a cavity. This cavity is then filled with an environment-sensitive dielectric material to form a sensing capacitor between plates formed by the metal adhesion layers or an array of contacts from other metal layers of the CMOS structure. This approach provides improved sensing capabilities in a system that is easily manufactured."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method, apparatus, and system for micromechanical gas chemical sensing capacitor","description":"A method for fabrication of capacitive environment sensors is provided in which the sensor elements are integrated in a CMOS structure with electronics through the use of complementary metal oxide sem","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8471304","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8471304","citation_suggestion":"Patentable. \"Method, apparatus, and system for micromechanical gas chemical sensing capacitor\" (US-8471304). https://patentable.app/patents/US-8471304","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8471304","json":"https://patentable.app/api/llm-context/US-8471304","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T23:29:08.095Z"}