{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8473095","patent":{"patent_number":"US-8473095","title":"Substrate processing apparatus, method of displaying error of substrate processing apparatus and transfer control method","assignee":null,"inventors":[],"filing_date":"2010-12-22T00:00:00.000Z","publication_date":"2013-06-25T00:00:00.000Z","cpc_codes":["H01L","G05B","H01L","H01L","G05B","G05B"],"num_claims":20,"abstract":"A substrate processing apparatus capable of easily checking a state of a transfer mechanism when an error occurs and readily determining a cause of the error is provided. The substrate processing apparatus includes at least one sensor provided in a transfer mechanism for transferring a substrate, a transfer control module for receiving sensing data transmitted by the at least one sensor, a transfer system controller for controlling the transfer control module, and a manipulation unit at least including a display unit for displaying a state of the transfer mechanism based on the sensed data. Therefore, when an error occurs, at least the sensed data transmitted by the at least one sensor is displayed on the display unit."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus, method of displaying error of substrate processing apparatus and transfer control method","description":"A substrate processing apparatus capable of easily checking a state of a transfer mechanism when an error occurs and readily determining a cause of the error is provided. The substrate processing appa","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8473095","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8473095","citation_suggestion":"Patentable. \"Substrate processing apparatus, method of displaying error of substrate processing apparatus and transfer control method\" (US-8473095). https://patentable.app/patents/US-8473095","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8473095","json":"https://patentable.app/api/llm-context/US-8473095","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:41:45.317Z"}