{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8473096","patent":{"patent_number":"US-8473096","title":"Substrate transfer robot, substrate transfer device, semiconductor manufacturing apparatus, and method for producing semiconductor","assignee":null,"inventors":[],"filing_date":"2010-02-12T00:00:00.000Z","publication_date":"2013-06-25T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":17,"abstract":"A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of arms which are capable of turning in a horizontal plane. The arm unit has the substrate gripping portion at a leading end of the arm unit and is configured to transfer the substrate between a plurality of taught positions taught beforehand. When the taught positions are taught, the controller is configured to generate an access standby position corresponding to each of the plurality of taught positions and configured to generate and store a plurality of routes from the access standby position to a minimum turning posture of the substrate transfer robot."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate transfer robot, substrate transfer device, semiconductor manufacturing apparatus, and method for producing semiconductor","description":"A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8473096","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8473096","citation_suggestion":"Patentable. \"Substrate transfer robot, substrate transfer device, semiconductor manufacturing apparatus, and method for producing semiconductor\" (US-8473096). https://patentable.app/patents/US-8473096","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8473096","json":"https://patentable.app/api/llm-context/US-8473096","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:21:39.094Z"}