{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8476167","patent":{"patent_number":"US-8476167","title":"Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus","assignee":null,"inventors":[],"filing_date":"2011-02-03T00:00:00.000Z","publication_date":"2013-07-02T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":13,"abstract":"The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus","description":"The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes provid","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8476167","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8476167","citation_suggestion":"Patentable. \"Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus\" (US-8476167). https://patentable.app/patents/US-8476167","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8476167","json":"https://patentable.app/api/llm-context/US-8476167","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:57:12.514Z"}