{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8476809","patent":{"patent_number":"US-8476809","title":"Microelectromechanical systems (MEMS) resonators and related apparatus and methods","assignee":null,"inventors":[],"filing_date":"2012-05-08T00:00:00.000Z","publication_date":"2013-07-02T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":17,"abstract":"Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Microelectromechanical systems (MEMS) resonators and related apparatus and methods","description":"Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a pie","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8476809","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8476809","citation_suggestion":"Patentable. \"Microelectromechanical systems (MEMS) resonators and related apparatus and methods\" (US-8476809). https://patentable.app/patents/US-8476809","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8476809","json":"https://patentable.app/api/llm-context/US-8476809","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:48:18.223Z"}