{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8481934","patent":{"patent_number":"US-8481934","title":"Method for inspecting and measuring sample and scanning electron microscope","assignee":null,"inventors":[],"filing_date":"2011-05-14T00:00:00.000Z","publication_date":"2013-07-09T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":8,"abstract":"As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first electron beam to a sample to charge the sample are proposed wherein the beam diameter of the first electron beam is made larger than the beam diameter of the second electron beam."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for inspecting and measuring sample and scanning electron microscope","description":"As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first ele","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8481934","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8481934","citation_suggestion":"Patentable. \"Method for inspecting and measuring sample and scanning electron microscope\" (US-8481934). https://patentable.app/patents/US-8481934","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8481934","json":"https://patentable.app/api/llm-context/US-8481934","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:46:05.364Z"}