{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8486840","patent":{"patent_number":"US-8486840","title":"Inverse spacer processing","assignee":null,"inventors":[],"filing_date":"2011-11-11T00:00:00.000Z","publication_date":"2013-07-16T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":22,"abstract":"A method includes making a target feature of an integrated circuit by providing a main layer over a substrate, depositing a first mask layer over the main layer, patterning the first mask layer, forming sidewall spacers with a width (w) in adjoining sidewalls of the patterned first mask layer and exposing a top area of the patterned first mask layer, selectively removing the first mask layer and exposing a portion of the main layer between the sidewall spacers, depositing a second mask layer over the main layer between the sidewall spacers, selectively removing the sidewall spacers to form an opening and exposing another portion of the main layer in the opening, etching the main layer through the opening to form the target feature."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inverse spacer processing","description":"A method includes making a target feature of an integrated circuit by providing a main layer over a substrate, depositing a first mask layer over the main layer, patterning the first mask layer, formi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8486840","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8486840","citation_suggestion":"Patentable. \"Inverse spacer processing\" (US-8486840). https://patentable.app/patents/US-8486840","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8486840","json":"https://patentable.app/api/llm-context/US-8486840","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T09:35:52.066Z"}