{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8489218","patent":{"patent_number":"US-8489218","title":"Chamber match using important variables filtered by dynamic multivariate analysis","assignee":null,"inventors":[],"filing_date":"2010-10-15T00:00:00.000Z","publication_date":"2013-07-16T00:00:00.000Z","cpc_codes":["G06Q","G05B","G05B","G05B","G05B"],"num_claims":20,"abstract":"The present disclosure provides a method of chamber match. The method includes identifying a golden chamber designed operable to implement a semiconductor process; identifying a reference chamber designed operable for the semiconductor process; and extracting a matching index of a processing chamber relative to the golden chamber and the reference chamber using a dynamic variable analysis."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Chamber match using important variables filtered by dynamic multivariate analysis","description":"The present disclosure provides a method of chamber match. The method includes identifying a golden chamber designed operable to implement a semiconductor process; identifying a reference chamber desi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8489218","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8489218","citation_suggestion":"Patentable. \"Chamber match using important variables filtered by dynamic multivariate analysis\" (US-8489218). https://patentable.app/patents/US-8489218","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8489218","json":"https://patentable.app/api/llm-context/US-8489218","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T23:30:40.167Z"}