{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8492824","patent":{"patent_number":"US-8492824","title":"Semiconductor memory device and method for manufacturing same","assignee":null,"inventors":[],"filing_date":"2011-09-02T00:00:00.000Z","publication_date":"2013-07-23T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":8,"abstract":"According to one embodiment, a method for manufacturing a semiconductor memory device includes: forming a stacked body including insulating films stacked alternately with electrode films, a memory hole is made in one portion of the stacked body to extend in a stacking direction, a charge storage layer is provided on an inner surface of the memory hole, a semiconductor member is provided in the memory hole; forming a hard mask on the stacked body, the hard mask has a plurality of holes of mutually different sizes; plugging the smallest of the holes while shrinking the other holes by depositing a mask material; making contact holes by removing a prescribed number of the insulating films and a prescribed number of the electrode films in regions directly under the other holes by performing etching using the mask material and the hard mask as a mask; and filling conductive material into the contact holes."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor memory device and method for manufacturing same","description":"According to one embodiment, a method for manufacturing a semiconductor memory device includes: forming a stacked body including insulating films stacked alternately with electrode films, a memory hol","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8492824","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8492824","citation_suggestion":"Patentable. \"Semiconductor memory device and method for manufacturing same\" (US-8492824). https://patentable.app/patents/US-8492824","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8492824","json":"https://patentable.app/api/llm-context/US-8492824","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T20:11:27.150Z"}