{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8498468","patent":{"patent_number":"US-8498468","title":"Mask inspection","assignee":null,"inventors":[],"filing_date":"2003-09-30T00:00:00.000Z","publication_date":"2013-07-30T00:00:00.000Z","cpc_codes":["G06T","G06T"],"num_claims":20,"abstract":"A method of inspecting a mask, where a structure on the mask is optically imaged at a resolution specified by a criteria set including at least one of a method by which the structure was formed, a tolerance, and a structure type, to produce an optical image. The optical image is compared to a baseline image, and the differences between the optical image and the baseline image are identified. The differences are compared to a threshold value, and any differences that exceed the threshold value are flagged as defects."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mask inspection","description":"A method of inspecting a mask, where a structure on the mask is optically imaged at a resolution specified by a criteria set including at least one of a method by which the structure was formed, a tol","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8498468","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8498468","citation_suggestion":"Patentable. \"Mask inspection\" (US-8498468). https://patentable.app/patents/US-8498468","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8498468","json":"https://patentable.app/api/llm-context/US-8498468","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:43:41.669Z"}